NIPPON MUKI

NIPPON MUKI

34Products

NIPPON MUKI Co., Ltd. is a Japanese manufacturer specializing in high-efficiency air filters. Their product range covers HEPA (H13/H14), ULPA (U15/U16/U17), high-temperature filters (150°C–500°C), low-boron/low-outgassing semiconductor-grade filters, chemical filters, and pre/medium-efficiency filters — serving semiconductor fabs, flat panel display plants, pharmaceutical GMP facilities, and lithium battery dry rooms.

Key product series: ATMOS series (ATML/ATMC/ATMPK) for standard HEPA/ULPA applications in cleanroom ceilings and FFUs; HEATMOS series (ATMCH/ATMCU/ATMV/ATMWC) covering 250°C–500°C using glass fiber or quartz fiber media with stainless steel frames; Nouvelle series (TGML/TGMC/TGMML) featuring ultra-low organic outgassing and low boron release for advanced semiconductor nodes (≤7nm); PureChemix series (ACGM) for VOC adsorption and Iochemix series (ECSL) for ion-exchange acid removal.

NIPPON MUKI filters are known for 100% made-in-Japan production, individual DOP/PAO scan testing at factory, and consistent quality that meets ISO 14644-1 Class 1–5 acceptance criteria.

Activated Carbon Chemical Filters

Medium Filters

Heat-Resistant HEPA

Standard HEPA

Standard ULPA

Pre-Filters

Frequently Asked Questions

What makes NIPPON MUKI HEPA filters different from standard HEPA?
NIPPON MUKI HEPA/ULPA filters feature 100% made-in-Japan production with individual DOP/PAO scan testing and test reports for every filter. The ATMOS series uses ultra-fine glass fiber media with low-pressure-drop design to reduce FFU energy consumption. The Nouvelle series further achieves ultra-low organic outgassing (≤5 μg/m³) and low boron release (≤1 ng/m³), meeting the stringent AMC requirements of advanced semiconductor processes at ≤7nm nodes.
What is the maximum temperature rating for NIPPON MUKI high-temperature filters?
The HEATMOS series covers different temperature ranges: ATMCH (250°C), ATMCU (350°C), ATMV/ATMVC (350°C high airflow), and ATMWC (500°C). Filter media progresses from glass fiber to quartz fiber, with stainless steel frames throughout. Typical applications include semiconductor diffusion furnace exhaust, lithium battery dry rooms, ceramic sintering furnace intake, and high-temperature oven exhaust filtration.
Why do semiconductor fabs need Nouvelle low-boron/low-outgassing filters instead of standard HEPA?
The Nouvelle series (TGML/TGMC/TGMML) uses specially formulated filter paper and treated sealant materials to minimize organic outgassing and boron release. At ≤7nm process nodes, boron causes device doping deviations and organic compounds form molecular-level contamination on wafer surfaces — both leading to yield loss. EUV lithography areas and CVD/ALD gas inlet stages require low-boron, low-outgassing HEPA/ULPA filters.

Need Custom Filters?

Special sizes, specific efficiencies, special materials — we can customize to your exact requirements. Contact us for a quote.