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Cleanroom Filters — High-Efficiency HEPA / ULPA

HEPA / ULPA Filters

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HEPA filters (High Efficiency Particulate Air) and ULPA filters (Ultra Low Particulate Air) are the core filtration components for high-cleanliness environments. Under EN 1822, HEPA covers H13 (99.95%) and H14 (99.995%); ULPA covers U15, U16, and U17, reaching efficiencies up to 99.9999995%. The widely-mentioned H10, H11, and H12 grades are classified as EPA (Efficient Particulate Air) under EN 1822, with efficiencies from 85% to 99.5%, and are typically used as pre-filtration. HEPA filter testing is based on MPPS (Most Penetrating Particle Size, approximately 0.12–0.25μm), which most accurately reflects actual filter performance at the most difficult-to-capture particle size range.

Specification options include standard aluminum-frame gel-seal type, knife-edge seal type, stainless steel corrosion-resistant type, and dry-box type, with aluminum foil or hot-melt adhesive line separators, or separator-free construction. Each unit undergoes individual DOP/PAO aerosol scan testing at the factory, with test reports provided. Selection must consider rated airflow, initial pressure drop, frame material compatibility, sealing mechanism, and test methodology.

Typical applications: semiconductor front-end wafer fabrication and back-end packaging, TFT-LCD and OLED display production lines, BSL-2/3 biosafety laboratories, aseptic pharmaceutical filling zones, positive and negative pressure hospital operating rooms, and PCR testing facilities.

Cleanroom filter selection must align with ISO 14644-1 cleanliness classes: ISO Class 1–3 environments require ULPA U15–U17 filters; ISO Class 4–5 (semiconductor front-end fabs) call for HEPA H14 (99.995%); ISO Class 6 (general cleanrooms) uses HEPA H13 (99.95%); ISO Class 7–8 (packaging areas, laboratories) can use EPA-grade H10–H12. Actual selection must also consider ceiling coverage ratio [verify], FFU recirculation ratio, and terminal installation method (gel-seal vs. knife-edge).

A multi-stage filtration strategy effectively extends cleanroom filter life and reduces total cost of ownership (TCO). The typical three-stage configuration is: pre-filter (G4) capturing particles above 5μm → medium filter (F7–F9) capturing 1–5μm particles → HEPA/ULPA terminal filtration. Medium filter quality directly determines HEPA lifespan — a well-designed configuration can extend HEPA service life by 2–3× [verify], significantly reducing replacement frequency and downtime costs.

Ceiling HEPA Box Air Filter Module - HEPA / ULPA Filters

Ceiling HEPA Box Air Filter Module

HEPA Aluminum Separator Filter - for AHU - HEPA/ULPA High-Efficiency Filters

HEPA Aluminum Separator Filter - for AHU

Gel-Seal HEPA Filter - HEPA / ULPA Filters

Gel-Seal HEPA Filter

Cleanroom Mini-Pleat HEPA ULPA High-Efficiency Filter - HEPA / ULPA Filters

Cleanroom Mini-Pleat HEPA ULPA High-Efficiency Filter

Operating Room / Negative-Pressure Isolation Ward Hospital HEPA Box - HEPA / ULPA Filters

Operating Room / Negative-Pressure Isolation Ward Hospital HEPA Box

V-Bank Filter Box - HEPA / ULPA Filters

V-Bank Filter Box

Frequently Asked Questions

HEPA filter grade comparison: H10, H11, H12, H13, H14, U15 — how to choose?
Under EN 1822: H13 (99.95%) is basic HEPA, H14 (99.995%) is standard HEPA, U15–U17 are ULPA (99.9995%+). The H10/H11/H12 grades commonly seen in the market are classified as EPA (Efficient Particulate Air, 85%–99.5%) under EN 1822 and serve as pre-filtration. Selection mapping per ISO 14644: Class 5 uses H14, Class 6–7 uses H13, Class 8 uses H12, Class 9 can use H11. Upgrade to ULPA only for semiconductor lithography or nanoscale processes.
Can HEPA filters be washed?
No. HEPA filters use the dense structure of glass fiber media combined with electret electrostatic effects to capture 0.3μm particles — washing destroys the fiber structure and charge, permanently degrading efficiency. Professional HEPA filters (H13/H14) are designed as single-use; replace the entire unit when end-of-life is reached. Washable filters on the market are mostly G3/G4 pre-filter grades with only 30%–95% efficiency, not true HEPA.
How long do HEPA filters last? When should they be replaced?
Lifespan depends on three triggers; replace when any is met: 1) pressure drop reaches 2× initial value (typically 1–3 years), 2) cleanliness testing fails, 3) accumulated runtime exceeds manufacturer recommendation (usually 18–36 months). For semiconductor processes, online differential pressure monitoring saves 30%–40% cost vs. time-based replacement. Baisheng provides on-site pressure measurement and replacement consultation.
What is the difference between HEPA and ULPA filters?
Under EN 1822: HEPA covers H13 (99.95%) and H14 (99.995%); ULPA covers U15 (99.9995%), U16 (99.99995%), and U17 (99.9999995%). ULPA is used in more demanding applications than HEPA, such as semiconductor front-end wafer fabrication, nanoscale processes, and BSL-4 laboratories.
What is MPPS and why is it used as the test benchmark?
MPPS (Most Penetrating Particle Size) is the hardest-to-capture particle size, approximately 0.12–0.25μm. EN 1822 uses MPPS as its test benchmark to most accurately reflect actual filter performance. Compared to the traditional 0.3μm DOP test, MPPS is more rigorous and better represents worst-case filtration efficiency.
What sealing methods are available for HEPA filters?
The three main types are: Gel Seal (best airtightness, used in semiconductor cleanrooms), Knife Edge (used in biosafety cabinets), and Gasket (lower cost, suitable for general cleanliness requirements). The right choice depends on the required leak tightness and installation environment.
Is each HEPA filter tested individually before shipment?
Yes. All Baisheng Tech HEPA/ULPA filters undergo individual DOP/PAO aerosol scan testing before shipment. A test report is included with each unit, covering test airflow, penetration rate, and initial pressure drop. A Certificate of Conformance can be provided upon request.
How to select cleanroom filters? What specs match each ISO class?
Selection follows ISO 14644-1: ISO Class 1–3 (advanced processes) require ULPA U15–U17; ISO Class 4–5 (semiconductor, display) use HEPA H14 (99.995%); ISO Class 6 (general cleanrooms) use HEPA H13 (99.95%); ISO Class 7–8 (packaging, labs) can use EPA-grade H10–H12. Beyond efficiency, also evaluate FFU airflow, ceiling coverage ratio, sealing method (gel-seal vs. knife-edge), and terminal frame type.
Why is multi-stage filtration needed? Can HEPA be used directly?
Using HEPA directly in outdoor air would cause rapid clogging from coarse particles, potentially reducing lifespan from 2 years to 3–6 months. Three-stage filtration (pre-filter G4 → medium F7–F9 → HEPA/ULPA) lets each stage handle its target particle range. A well-designed configuration extends HEPA life by 2–3×, significantly reducing replacement costs and downtime. Medium filter quality is the key factor determining HEPA lifespan.
Customization

Need Custom Filters?

Special sizes, specific efficiencies, special materials — we can customize to your exact requirements. Contact us for a quote.

Inquire About Custom Filters+886-2-25981958