NIPPON MUKI
ATMCH-SL Silicone-Free Heat-Resistant HEPA (250°C)
Product Overview
ATMCH-SL is the silicone-free variant of ATMCH, rated for continuous 250°C and 99.97% efficiency @ 0.3 μm. Engineered for semiconductor and other silicone-contamination-sensitive processes — no silicone compounds in any material.
Key features
・Continuous operation up to 250°C
・99.97% @ 0.3 μm filtration efficiency
・Fully silicone-free
・Designed for semiconductor and Si-AMC-sensitive environments
Target industries：Medical, Pharmaceutical, Electronics, Power generation, Nuclear power
Features & Specifications
| No. | Model | Efficiency | W (mm) | H (mm) | D (mm) | Airflow (CMM) | Airflow (CMH) | Initial PD (Pa) |
|---|---|---|---|---|---|---|---|---|
| 1 | ATMCH-Z-Q-SLS4 | 99.97%@0.3μm | 305 | 305 | 150 | 6.0 | 360 | 249 |
| 2 | ATMCH-Z-Q-SLS4 | 99.97%@0.3μm | 305 | 610 | 150 | 12.5 | 750 | 249 |
| 3 | ATMCH-Z-Q-SLS4 | 99.97%@0.3μm | 457 | 457 | 150 | 14.5 | 870 | 249 |
| 4 | ATMCH-28-Q-SLS4 | 99.97%@0.3μm | 610 | 610 | 150 | 28.0 | 1680 | 249 |
| 5 | ATMCH-Z-Q-SLS4 | 99.97%@0.3μm | 915 | 610 | 150 | 43.0 | 2580 | 249 |
| 6 | ATMCH-Z-P-SLS4 | 99.97%@0.3μm | 305 | 610 | 290 | 18.5 | 1110 | 249 |
| 7 | ATMCH-Z-P-SLS4 | 99.97%@0.3μm | 457 | 610 | 290 | 29.5 | 1770 | 249 |
| 8 | ATMCH-41-P-SLS4 | 99.97%@0.3μm | 610 | 610 | 290 | 41.0 | 2460 | 249 |
| 9 | ATMCH-Z-P-SLS4 | 99.97%@0.3μm | 762 | 610 | 290 | 52.0 | 3120 | 249 |
| 10 | ATMCH-Z-P-SLS4 | 99.97%@0.3μm | 1000 | 760 | 292 | 87.5 | 5250 | 249 |
Detailed Description
ATMCH-SL is developed for semiconductor, photonics and similar processes sensitive to silicone-based airborne molecular contaminants (Si-AMC). All sealants and adhesives avoid silicone compounds so the filter itself is not a contamination source.
Materials & Construction
| Property | Specification |
|---|---|
| Filter frame | STAINLESS STEEL |
| Media | GLASS PAPER |
| Max. temperature | 250°C |
| Separator | ALUMINUM |
| Gasket | PTFE |
| Grille (downstream) | - |
| Grille (upstream) | - |
| Sealant | GLASS FIBER |
| Max airflow | Can be calculated on request |
| Max final PD (Pa) | 498 |
Airflow vs Pressure Drop (representative)
Applications
- High-temperature zones in semiconductor fabs - Cleanrooms in photonics / OLED manufacturing - HVAC sensitive to Si-AMC at elevated temperatureSelection Notes
- For applications without silicone sensitivity, standard ATMCH is more economical. - For semiconductor or Si-AMC-sensitive applications, choose ATMCH-SL. - **150 mm / 290 mm** — select by airflow.Selection References
Before ordering, verify the efficiency grade, media type, and whether the operating environment fits your requirements.
