NIPPON MUKI
BGML Low-Boron HEPA Filter
Product Overview
BGML is a low-boron mini-pleats HEPA filter with 99.99% efficiency @ 0.3 μm. Low-boron glass-fiber media + mini-pleats construction — a low-PD low-boron spec for semiconductor FFU terminal filtration.
Key features
・Low-boron glass-fiber media (<10 ppm B)
・HEPA 99.99% @ 0.3 μm
・Mini-pleats construction (low PD)
・Standard for semiconductor FFUs
Target industries：Electronics
Features & Specifications
| No. | Model | Efficiency | W (mm) | H (mm) | D (mm) | Airflow (CMM) | Airflow (CMH) | Initial PD (Pa) |
|---|---|---|---|---|---|---|---|---|
| 1 | BGML-Z-E41 | 99.99%@0.3μm | 305 | 305 | 65 | 2.0 | 120 | 98 |
| 2 | BGML-Z-E41 | 99.99%@0.3μm | 457 | 457 | 65 | 5.0 | 300 | 98 |
| 3 | BGML-Z-E41 | 99.99%@0.3μm | 305 | 610 | 65 | 4.5 | 270 | 98 |
| 4 | BGML-10-E41 | 99.99%@0.3μm | 610 | 610 | 65 | 10.0 | 600 | 98 |
| 5 | BGML-Z-E41 | 99.99%@0.3μm | 762 | 610 | 65 | 12.5 | 750 | 98 |
| 6 | BGML-Z-E41 | 99.99%@0.3μm | 915 | 610 | 65 | 15.0 | 900 | 98 |
| 7 | BGML-20-E41 | 99.99%@0.3μm | 1220 | 610 | 65 | 20.5 | 1230 | 98 |
| 8 | BGML-Z-E41 | 99.99%@0.3μm | 1500 | 1220 | 65 | 52.5 | 3150 | 98 |
| 9 | BGML-Z-E23 | 99.99%@0.3μm | 305 | 305 | 75 | 2.0 | 120 | 88 |
| 10 | BGML-Z-E23 | 99.99%@0.3μm | 457 | 457 | 75 | 5.0 | 300 | 88 |
| 11 | BGML-Z-E23 | 99.99%@0.3μm | 305 | 610 | 75 | 4.5 | 270 | 88 |
| 12 | BGML-10-E23 | 99.99%@0.3μm | 610 | 610 | 75 | 10.0 | 600 | 88 |
| 13 | BGML-Z-E23 | 99.99%@0.3μm | 762 | 610 | 75 | 12.5 | 750 | 88 |
| 14 | BGML-Z-E23 | 99.99%@0.3μm | 915 | 610 | 75 | 15.0 | 900 | 88 |
| 15 | BGML-20-E23 | 99.99%@0.3μm | 1220 | 610 | 75 | 20.5 | 1230 | 88 |
| 16 | BGML-Z-E23 | 99.99%@0.3μm | 1500 | 1220 | 75 | 52.5 | 3150 | 88 |
| 17 | BGML-Z-E38 | 99.99%@0.3μm | 305 | 305 | 98 | 2.0 | 120 | 84 |
| 18 | BGML-Z-E38 | 99.99%@0.3μm | 457 | 457 | 98 | 5.0 | 300 | 84 |
| 19 | BGML-Z-E38 | 99.99%@0.3μm | 305 | 610 | 98 | 4.5 | 270 | 84 |
| 20 | BGML-10-E38 | 99.99%@0.3μm | 610 | 610 | 98 | 10.0 | 600 | 84 |
| 21 | BGML-Z-E38 | 99.99%@0.3μm | 762 | 610 | 98 | 12.5 | 750 | 84 |
| 22 | BGML-Z-E38 | 99.99%@0.3μm | 915 | 610 | 98 | 15.5 | 930 | 84 |
| 23 | BGML-Z-E38 | 99.99%@0.3μm | 1000 | 610 | 98 | 17.0 | 1020 | 84 |
| 24 | BGML-20-E38 | 99.99%@0.3μm | 1220 | 610 | 98 | 20.5 | 1230 | 84 |
| 25 | BGML-Z-E38 | 99.99%@0.3μm | 1500 | 1220 | 98 | 53.0 | 3180 | 84 |
Detailed Description
BGML combines low-boron construction with the low-PD benefits of mini-pleats — the classic choice for semiconductor ceiling FFUs. Addresses both boron-AMC concerns and energy-efficiency requirements.
Materials & Construction
| Property | Specification |
|---|---|
| Filter frame | ALUMINUM |
| Media | GLASS PAPER |
| Max. temperature | 60°C |
| Relative humidity | 60%RH |
| Separator | HOT MELT ADHESIVE |
| Gasket | EPDM |
| Grille (downstream) | - |
| Grille (upstream) | - |
| Sealant | POLYURETHANE RESIN |
| Max airflow | Can be calculated on request |
| Max final PD (Pa) | 294 |
Airflow vs Pressure Drop (representative)
Applications
- Semiconductor ceiling FFUs - Lithography bay FFUs in wafer foundries - Cleanroom FFUs in memory fabsSelection Notes
- High airflow → BGMC (separator type). - Low PD → BGML (this model). - Low-organic also required → TGML.Selection References
Before ordering, verify the efficiency grade, media type, and whether the operating environment fits your requirements.
