NIPPON MUKI
ATMOS ATMMC Standard ULPA Filter
Product Overview
ATMMC is Nippon Muki’s standard ULPA filter with 99.9995% efficiency @ 0.1-0.15 μm. The separator-type construction delivers industry-leading filtration for the most demanding cleanrooms — semiconductor fabs, biopharmaceutical Grade A zones and similar.
Key features
・ULPA 99.9995% @ 0.1-0.15 μm
・Separator-type construction (high airflow)
・Suitable for ISO Class 3 or stricter
・Aluminum frame + glass-fiber media
Target industries:Medical, Pharmaceutical, Electronics
Features & Specifications
| No. | Model | Efficiency | W (mm) | H (mm) | D (mm) | Airflow (CMM) | Airflow (CMH) | Initial PD (Pa) |
|---|---|---|---|---|---|---|---|---|
| 1 | ATMMC-Z-E23 | 99.9995%@0.1-0.15μm | 305 | 305 | 75 | 2.5 | 150 | 186 |
| 2 | ATMMC-Z-E23 | 99.9995%@0.1-0.15μm | 305 | 610 | 75 | 5.0 | 300 | 186 |
| 3 | ATMMC-Z-E23 | 99.9995%@0.1-0.15μm | 610 | 610 | 75 | 12.0 | 720 | 186 |
| 4 | ATMMC-Z-E23 | 99.9995%@0.1-0.15μm | 915 | 610 | 75 | 18.0 | 1080 | 186 |
| 5 | ATMMC-Z-E23 | 99.9995%@0.1-0.15μm | 1220 | 610 | 75 | 24.0 | 1440 | 186 |
| 5 | ATMMC-Z-E23 | 99.9995%@0.1-0.15μm | 1220 | 760 | 75 | 30.0 | 1800 | 186 |
| 11 | ATMMC-Z-E4 | 99.9995%@0.1-0.15μm | 305 | 305 | 150 | 3.5 | 210 | 186 |
| 12 | ATMMC-Z-E4 | 99.9995%@0.1-0.15μm | 305 | 610 | 150 | 7.5 | 450 | 186 |
| 13 | ATMMC-Z-E4 | 99.9995%@0.1-0.15μm | 610 | 610 | 150 | 17.0 | 1020 | 186 |
| 14 | ATMMC-Z-E4 | 99.9995%@0.1-0.15μm | 915 | 610 | 150 | 26.0 | 1560 | 186 |
| 15 | ATMMC-Z-E4 | 99.9995%@0.1-0.15μm | 1220 | 610 | 150 | 34.0 | 2040 | 186 |
| 15 | ATMMC-Z-E4 | 99.9995%@0.1-0.15μm | 1220 | 760 | 150 | 43.0 | 2580 | 186 |
Detailed Description
ATMOS ATMMC is Nippon Muki’s most popular standard ULPA, widely used in semiconductor fabs and pharmaceutical Grade A cleanrooms. Separator-type construction delivers high airflow and long service life.
Materials & Construction
| Property | Specification |
|---|---|
| Filter frame | ALUMINUM |
| Media | GLASS PAPER |
| Max. temperature | 60°C |
| Relative humidity | 95%RH |
| Separator | ALUMINUM |
| Gasket | CHLOROPRENE |
| Grille (downstream) | - |
| Grille (upstream) | - |
| Sealant | POLYURETHANE RESIN |
| Max airflow | Can be calculated on request |
| Max final PD (Pa) | 490 |
Airflow vs Pressure Drop (representative)
Applications
- Terminal ULPA in semiconductor FFU installations - Grade A aseptic filling zones in pharmaceutical plants - ULPA filtration in biological safety cabinets - Photonics / OLED cleanroomsSelection Notes
- Standard version (this model) — general semiconductor / pharmaceutical use. - For low-boron, choose BGMML. - For low-organic + low-boron, choose TGMML. - Mini-pleats (ATMML) has lower pressure drop.Selection References
Before ordering, verify the efficiency grade, media type, and whether the operating environment fits your requirements.






