NIPPON MUKI
Nouvelle TGMC Low-Organic / Low-Boron High-Airflow HEPA Filter
Product Overview
TGMC is a simultaneous low-organic + low-boron separator-type HEPA filter with 99.97% efficiency @ 0.3 μm. Controls both organic and boron AMCs — the highest grade for high-airflow applications at leading-edge semiconductor nodes.
Key features
・Simultaneous low-organic + low-boron
・HEPA 99.97% @ 0.3 μm
・Separator-type (high airflow)
・Standard for high-flow sub-14 nm processes
Target industries：Medical, Pharmaceutical, Electronics
Features & Specifications
| No. | Model | Efficiency | W (mm) | H (mm) | D (mm) | Airflow (CMM) | Airflow (CMH) | Initial PD (Pa) |
|---|---|---|---|---|---|---|---|---|
| 1 | TGMC-Z-E4 | 99.97%@0.3μm | 305 | 305 | 150 | 6.0 | 360 | 249 |
| 2 | TGMC-Z-E4 | 99.97%@0.3μm | 305 | 610 | 150 | 13.0 | 780 | 249 |
| 3 | TGMC-Z-E4 | 99.97%@0.3μm | 457 | 610 | 150 | 20.5 | 1230 | 249 |
| 4 | TGMC-Z-E4 | 99.97%@0.3μm | 610 | 610 | 150 | 28.0 | 1680 | 249 |
| 5 | TGMC-Z-E4 | 99.97%@0.3μm | 762 | 610 | 150 | 35.0 | 2100 | 249 |
| 6 | TGMC-Z-E4 | 99.97%@0.3μm | 915 | 610 | 150 | 42.5 | 2550 | 249 |
| 7 | TGMC-Z-E4 | 99.97%@0.3μm | 1220 | 610 | 150 | 57.5 | 3450 | 249 |
| 8 | TGMC-Z-E4 | 99.97%@0.3μm | 1500 | 760 | 150 | 90.0 | 5400 | 249 |
| 9 | TGMC-Z-E42 | 99.97%@0.3μm | 305 | 305 | 290 | 8.5 | 510 | 249 |
| 10 | TGMC-Z-E42 | 99.97%@0.3μm | 305 | 610 | 290 | 19.0 | 1140 | 249 |
| 11 | TGMC-Z-E42 | 99.97%@0.3μm | 457 | 610 | 290 | 30.0 | 1800 | 249 |
| 12 | TGMC-41-E42 | 99.97%@0.3μm | 610 | 610 | 290 | 41.0 | 2460 | 249 |
| 13 | TGMC-51-E42 | 99.97%@0.3μm | 760 | 610 | 290 | 51.0 | 3060 | 249 |
| 14 | TGMC-Z-E42 | 99.97%@0.3μm | 1500 | 760 | 290 | 132.0 | 7920 | 249 |
| 15 | TGMC-50-E42T | 99.97%@0.3μm | 610 | 610 | 290 | 50 | 3000 | 249±20 |
| 16 | TGMC-62-E42T | 99.97%@0.3μm | 760 | 610 | 290 | 62 | 3720 | 249±20 |
| 17 | TGMC-56-E48T | 99.97%@0.3μm | 610 | 610 | 290 | 56 | 3360 | 285 |
Detailed Description
TGMC integrates both TG (low-organic) and BG (low-boron) specifications in a separator-type high-airflow frame. Designed for high-flow systems in ≤14 nm fabs that are sensitive to both AMC classes.
Materials & Construction
| Property | Specification |
|---|---|
| Filter frame | ALUMINUM |
| Media | GLASS PAPER |
| Max. temperature | 60°C |
| Relative humidity | 60%RH |
| Separator | ALUMINUM |
| Gasket | EPDM |
| Grille (downstream) | - |
| Grille (upstream) | - |
| Sealant | POLYURETHANE RESIN |
| Max airflow | Can be calculated on request |
| Max final PD (Pa) | 498 |
Airflow vs Pressure Drop (representative)
Applications
- High-airflow AHUs in sub-14 nm fabs - Around EUV / DUV lithography equipment - Centralized HVAC for photoresist coating zonesSelection Notes
- Mini-pleats version → TGML (low PD). - Low-boron only → BGMC is more economical. - Low-organic only → contact for custom.Selection References
Before ordering, verify the efficiency grade, media type, and whether the operating environment fits your requirements.
