Gas Purifiers
Nitrogen Purifier
Product Overview
A large-flow, fully automatic regenerative nitrogen purifier. BSS8 runs two or more adsorption beds in parallel, alternating between ambient purification and high-temperature regeneration for 24-hour uninterrupted supply, with flow up to 50000 Nm³/h. Choose BSS9 where CH₄ must also be removed. Service life exceeds 20 years.
Features & Specifications
Performance table (applicable gas: N₂)
| Impurity | Inlet (ppm) | BSS8 outlet (ppb) |
|---|---|---|
| Process | — | ADS |
| H₂O | < 5 | < 1 |
| O₂ | < 3 | < 1 |
| CO | < 1 | < 1 |
| CO₂ | < 1 | < 1 |
| H₂ | < 2 | < 1 |
| CH₄ | < 0.5 | — (choose BSS9 if CH₄ removal is required) |
| NMHC | < 1 | < 1 |
| Particles | — | ≤ 1 pcs/m³ (@0.003μm) |
| Flow range | — | 10–50000 Nm³/h |
The table lists the specification and configuration of standard models only; please enquire for other special requirements.
Detailed Description
Process description
The BSS8 series runs two or more adsorption beds in parallel, alternating between ambient purification and high-temperature regeneration — one bed supplies while the other regenerates — giving 24-hour uninterrupted supply with a service life of over 20 years. Bed switching is executed automatically by the PLC on a timer or on outlet concentration, with no operator intervention. If the source gas contains CH₄ and the process cannot accept it, use BSS9 instead, which adds a high-temperature catalytic bed upstream.
System composition
・Gas path: four combination modes — multiple adsorption beds in parallel, multiple getter vessels in parallel, adsorption beds in series with getter vessels, and a single catalytic bed with multiple adsorption beds — together with valves, pipework and heat exchangers ・Electrical control: PLC, heating elements, temperature controllers, pressure sensors and touch screen, handling control, alarms, high-temperature interlocks and data logging for the whole systemProduct features
・Custom adsorbent material for stable, reliable purification ・Safe and reliable operation, with rupture discs and safety valves for relief, high-temperature mechanical interlocks and alarms ・Fully automatic operation with 24-hour uninterrupted supply ・High purification flow, a single set covering 10–50000 Nm³/h, with a service life of over 20 years ・Outlet particles ≤ 1 pcs/m³ (@0.003 μm), suitable for direct connection to the facility high-purity nitrogen mainProcesses and industries served
Nitrogen is the highest-volume bulk gas in a wafer fab — tool purging, chamber backfill, wafer transfer environments and facility line pressurisation all consume it. High volume means the consequences of contamination are magnified too, which is why central purification at facility level is close to standard practice. ・High-purity nitrogen mains at 12-inch wafer fabs ・Bulk inert gas supply for display and solar plants ・Lithium battery dry rooms, maintaining an inert environment at extremely low dew point ・Metal heat treatment and powder metallurgy: protective gas for high-temperature furnaces ・Nitrogen flushing in food and pharmaceutical packaging lines sensitive to moisture and oxygenInstallation and layout notes
・Normally located in the facility area: size and weight are both substantial, so plan the transport route, floor loading and service clearance ・Give regeneration exhaust its own route: the high-temperature regeneration step vents gas carrying impurities, which must be led to a safe discharge point ・Power and cooling: utility requirements for the heating section and heat exchangers vary by model, so provide the available site electrical conditions when specifying ・Isolation valves and a bypass: basic supply can then be maintained during a shutdown ・Fit online analysers at the outlet: continuous oxygen and moisture monitoring is the basis for judging switching timing and for acceptance ・Earthing and safety interlocks: confirm the high-temperature section interlocks operate correctly before commissioningMaintenance and regeneration
・Regeneration is a routine action of the equipment itself, scheduled automatically by the PLC with no manual intervention ・The adsorbent is designed for over 20 years under normal source conditions, making it a very long-cycle consumable ・Routine maintenance centres on valve actuation, temperature control elements and sensor calibration, which should be part of the annual overhaul ・On-site instruments can read outlet H₂O concentrations in N₂ down to the 0.001–0.006 ppbV range, which serves as an acceptance baselineChoosing between neighbouring models
| Model | Process | Removes CH₄ | Flow | Where it fits |
|---|---|---|---|---|
| BSS8 (this model) | ADS | No | 10–50000 Nm³/h | General facility high-purity nitrogen |
| BSS9 | CAT+ADS | Yes | 10–20000 Nm³/h | Source gas contains CH₄ and the process is sensitive |
| BSS8-H (high-pressure) | ADS | No | 10–100 Nm³/h | Supply at up to 240 bar |
| BSS14 large-flow ambient | Ambient adsorption | No | 100–5000 Nm³/h | Temporary or standby supply |
