암모니아 정제기 - 가스 정제기 | Baisheng Tech
품번BSS21가스 정제기전자동 정제기
가스 정제기

암모니아 정제기

제품 개요

NH₃에 적용하는 전자동 재생형 정제기입니다. 여러 개의 흡착 탑을 병렬로 두고 상온 정제와 고온 재생 두 모드를 번갈아 운전하며, H₂O, O₂, CO₂, NMHC의 출구 농도를 모두 1 ppb 이하로 제어할 수 있습니다. 유량은 10~100 Nm³/h이고 사용 수명은 20년 이상입니다.

제품 특성

Index Table (Applicable gas: NH₃)

ImpurityInlet (ppm)BSS21 Outlet (ppb)
ProcessADS
H₂O< 3< 1
O₂< 1< 1
CO₂< 1< 1
NMHC< 1< 1
Particles≤ 1 pcs/m³ (@0.003μm)
Flow range10–100 Nm³/h
Only the specifications and configurations of standard models are listed. Please contact us for special requirements.
견적 문의

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상세 설명

Background

Ammonia is a key reactant in LED, GaN epitaxy and several thin-film processes. Trace moisture and oxygen in the source gas directly affect epitaxial quality and device yield, so advanced processes normally add purification at the point of use.

Process Description

The BSS21 series runs multiple adsorption beds in parallel, alternating between ambient-temperature purification and high-temperature regeneration, with a service life over 20 years.

Product Features

・Fully automatic operation with 24-hour uninterrupted supply ・Bursting discs and relief valves for pressure release, high-temperature mechanical interlock and alarms ・PLC control with alarm, high-temperature interlock and data logging

Safety Note

Ammonia is toxic and corrosive. Equipment configuration, exhaust handling and leak detection must follow the site's specialty gas safety standards.