초임계 이산화탄소 정제기

제품 개요

초임계 이산화탄소 공정을 겨냥해 설계한 정제 설비입니다. 여러 개의 흡착 탑을 병렬로 두고 상온 정제와 고온 재생 두 모드를 번갈아 운전하며, 초임계 건조 품질에 영향을 주는 NO, NO₂, SO₂, 비휘발성 탄화수소 같은 불순물에 대해 전용 제거 지표를 갖추고 있습니다. 유량은 10~700 Nm³/h입니다.

제품 특성

Index Table (Applicable gas: supercritical CO₂)

Impurity	BSS32-SC Outlet (ppb)
Process	ADS
H₂O	< 1
Total volatile acids (as SO₂)	< 0.1
NO	< 0.1
NO₂	< 0.1
SO₂	< 0.005
Total volatile bases (as NH₃)	< 1
NH₃	< 0.5
Non-volatile hydrocarbons NVHC (as toluene)	< 0.01
Particles	≤ 1 pcs/m³ (@0.003μm)
Flow range	10–700 Nm³/h

Only the specifications and configurations of standard models are listed. Please contact us for special requirements.

견적 문의

LINE @baisheng

Email：sales@baisheng-tech.com

전화：+886-2-2598-1958

상세 설명

Why Supercritical CO₂ Needs Its Own Specification

Supercritical carbon dioxide combines the diffusivity of a gas with the solvating power of a liquid, letting it carry liquid out of high-aspect-ratio structures without surface tension. That is why it is used for wafer drying in advanced nodes, where it prevents pattern collapse. Precisely because it is a strong solvent, non-volatile hydrocarbons (NVHC) in the source gas dissolve under supercritical conditions and precipitate onto the wafer surface when pressure is released. Acidic impurities such as NO, NO₂ and SO₂ can corrode metal layers. So CO₂ for supercritical service has a different control list from ordinary high-purity CO₂ — the focus is NVHC and acidic gases, not just moisture.

Process Description

The BSS32-SC series runs multiple adsorption beds in parallel, alternating between ambient-temperature purification and high-temperature regeneration, with a service life over 20 years.

Product Features

・NVHC (as toluene) < 0.01 ppb, designed around the key metric for supercritical drying ・SO₂ < 0.005 ppb, suppressing the risk of metal corrosion ・Fully automatic operation with 24-hour uninterrupted supply

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