NIPPON MUKI 전용관
BGMML 저붕소 ULPA 필터
제품 개요
BGMML은 저붕소(Low-Boron) Mini-pleats형 ULPA 필터로 효율은 0.1-0.2 μm 기준 99.9995%입니다. 저붕소 유리섬유 여재를 써서 필터 본체가 붕소 화합물을 방출해 반도체 공정을 오염시키는 것을 막으며, 14nm 이하 선단 공정의 표준 사양입니다.
주요 특징
・ULPA 효율 99.9995% @ 0.1-0.2 μm
・저붕소 유리섬유 여재(< 10 ppm B)
・Mini-pleats 구조(저압손)
・14nm 이하 공정 표준 사양
적용 산업: 의료, 제약, 전자
제품 특성
| No. | Model | Efficiency | W (mm) | H (mm) | D (mm) | Airflow (CMM) | Airflow (CMH) | Initial PD (Pa) |
|---|---|---|---|---|---|---|---|---|
| 1 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 305 | 305 | 65 | 2.0 | 120 | 147 |
| 2 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 305 | 610 | 65 | 4.5 | 270 | 147 |
| 3 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 457 | 457 | 65 | 5.0 | 300 | 147 |
| 4 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 610 | 610 | 65 | 10.0 | 598 | 147 |
| 5 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 762 | 610 | 65 | 12.5 | 750 | 147 |
| 6 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 915 | 610 | 65 | 15.0 | 900 | 147 |
| 7 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 1220 | 610 | 65 | 20.5 | 1230 | 147 |
| 8 | BGMML-Z-E41 | 99.9995%@0.1-0.2μm | 1500 | 1220 | 65 | 52.5 | 3150 | 147 |
| 9 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 305 | 305 | 98 | 2.0 | 120 | 118 |
| 10 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 305 | 610 | 98 | 4.5 | 270 | 118 |
| 11 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 457 | 457 | 98 | 5.0 | 300 | 118 |
| 12 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 610 | 610 | 98 | 10.0 | 598 | 118 |
| 13 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 762 | 610 | 98 | 12.5 | 750 | 118 |
| 14 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 915 | 610 | 98 | 15.0 | 900 | 118 |
| 15 | BGMML-Z-E38 | 99.9995%@0.1-0.2μm | 1500 | 1220 | 98 | 52.5 | 3150 | 118 |
상세 설명
BGMML is engineered for advanced semiconductor nodes (≤14 nm). Boron in standard ULPA media can outgas in high-purity airflow and cause unintended p-type doping; BGMML uses low-boron glass fiber with <10 ppm B release.
Materials & Construction
| Property | Specification |
|---|---|
| Filter frame | ALUMINUM |
| Media | GLASS PAPER |
| Max. temperature | 60°C |
| Relative humidity | 60%RH |
| Separator | HOT MELT ADHESIVE |
| Gasket | CHLOROPRENE |
| Grille (downstream) | - |
| Grille (upstream) | - |
| Sealant | POLYURETHANE RESIN |
| Max airflow | Can be calculated on request |
| Max final PD (Pa) | 294 (245 when H>760) |
