Nouvelle TGML 저유기물·저붕소 HEPA 필터

제품 개요

TGML은 저유기물과 저붕소를 동시에 만족하는 Mini-pleats형 HEPA 필터로 효율은 0.3 μm 기준 99.99%입니다. Mini-pleats의 저압손 장점과 두 종류의 AMC 오염 문제를 한 번에 해결하여 14nm 이하 공정 FFU의 최고 등급입니다. 주요 특징 ・저유기물과 저붕소를 동시에 충족 ・HEPA 효율 99.99% @ 0.3 μm ・Mini-pleats 구조(저압손) ・선단 공정 FFU 최고 등급 적용 산업: 의료, 제약, 전자

제품 특성

No.	Model	Efficiency	W (mm)	H (mm)	D (mm)	Airflow (CMM)	Airflow (CMH)	Initial PD (Pa)
1	TGML-10-E25	99.99%@0.3μm	610	610	50	10.0	598	127
2	TGML-20-E25	99.99%@0.3μm	1220	610	50	20.5	1232	127
3	TGML-Z-E41	99.99%@0.3μm	305	305	65	2.0	120	98
4	TGML-Z-E41	99.99%@0.3μm	457	457	65	5.0	300	98
5	TGML-Z-E41	99.99%@0.3μm	305	610	65	4.5	270	98
6	TGML-10-E41	99.99%@0.3μm	610	610	65	10.0	600	98
7	TGML-Z-E41	99.99%@0.3μm	762	610	65	12.5	750	98
8	TGML-Z-E41	99.99%@0.3μm	915	610	65	15.0	900	98
9	TGML-20-E41	99.99%@0.3μm	1220	610	65	20.5	1230	98
10	TGML-Z-E41	99.99%@0.3μm	1500	915	65	39.0	2340	98
11	TGML-Z-E23	99.99%@0.3μm	305	305	75	2.0	120	88
12	TGML-Z-E23	99.99%@0.3μm	457	457	75	5.0	300	88
13	TGML-Z-E23	99.99%@0.3μm	305	610	75	4.5	270	88
14	TGML-10-E23	99.99%@0.3μm	610	610	75	10.0	600	88
15	TGML-Z-E23	99.99%@0.3μm	762	610	75	12.5	750	88
16	TGML-Z-E23	99.99%@0.3μm	915	610	75	15.0	900	88
17	TGML-20-E23	99.99%@0.3μm	1220	610	75	20.5	1230	88
18	TGML-Z-E23	99.99%@0.3μm	1500	915	75	39.0	2340	88
19	TGML-Z-E38	99.99%@0.3μm	305	305	98	2.0	120	84
20	TGML-Z-E38	99.99%@0.3μm	457	457	98	5.0	300	84
21	TGML-Z-E38	99.99%@0.3μm	508	508	98	6.5	390	84
22	TGML-Z-E38	99.99%@0.3μm	305	610	98	4.5	270	84
23	TGML-10-E38	99.99%@0.3μm	610	610	98	10.0	600	84
24	TGML-Z-E38	99.99%@0.3μm	762	610	98	12.5	750	84
25	TGML-Z-E38	99.99%@0.3μm	915	610	98	15.5	930	84
26	TGML-Z-E38	99.99%@0.3μm	1000	610	98	17.0	1020	84
27	TGML-20-E38	99.99%@0.3μm	1220	610	98	20.5	1230	84
28	TGML-Z-E38	99.99%@0.3μm	1500	915	98	39.5	2370	84

견적 문의

LINE @baisheng

Email：sales@baisheng-tech.com

전화：+886-2-2598-1958

상세 설명

TGML is the ultimate AMC spec in a mini-pleats form factor — controlling both organic and boron contamination simultaneously. Designed for FFUs at sub-14 nm processes where low PD is essential and cleanliness cannot be compromised.

Materials & Construction

Property	Specification
Filter frame	ALUMINUM
Media	GLASS PAPER
Max. temperature	60°C
Relative humidity	60%RH
Separator	HOT MELT ADHESIVE
Gasket	EPDM
Grille (downstream)	-
Grille (upstream)	-
Sealant	POLYURETHANE RESIN
Max airflow	Can be calculated on request
Max final PD (Pa)	294