여과 설비
AMC 케미컬 여과 하우징
제품 개요
Baisheng의 AMC 케미컬 여과 하우징은 케미컬 여재, 전후단 미립자 필터, 송풍기를 하나의 정비 가능한 케이싱에 통합한 기체상 오염물질 제거 설비입니다. 처리 대상은 HEPA가 잡지 못하는 분자급 오염물질, 즉 산, 염기, 응축물, 도판트, 일반 VOC입니다.
전 시리즈는 여섯 가지 기종을 아우릅니다. 실내 순환용 BS-APS, 외기 양압 급기용 BS-PPS, 덕트에 연결하는 BS-SAH 측면 인출식 케이싱, 고농도를 처리하는 BS-DBS 딥베드 스크러버, 한 단으로 끝내는 BS-HDBS, 점 오염원 국소 배기용 BS-DS 드럼 스크러버입니다. 풍량은 단일 약액조 배기의 170 CMH부터 MAU 주 덕트의 68,000 CMH까지 대응 기종이 있습니다.
케이싱은 용융아연도금 강판 또는 SUS304/316을 쓰고 이음매를 전부 용접합니다. 전후단 필터와 케미컬 여재 모두 측면 도어 설계라 덕트를 뜯지 않은 상태로 교체할 수 있습니다. 케미컬 단을 가로지르는 차압계가 기본 사양이며, 전단 필터 막힘인지 여재 포화인지 판독하는 데 씁니다.
여재 구성, 케이싱 재질, 플랜지 형식, 반면 배치는 모두 현장 조건에 맞춰 제작합니다. 아래 선정 가이드가 네 단계를 설명합니다.
제품 특성
►**Target contaminants**: acids (HCl, HF, SOx, NOx), bases (NH₃, amines), condensables (BHT, NMP, DOP), dopants (AsH₃, B₂H₆, BF₃), general VOCs
►**Airflow range**: 170 – 68,000 CMH (by model — see the selection guide below)
►**Enclosure material**: galvanised steel / SUS304 / SUS316, fully welded seams, no exposed threads inside
►**Chemical stage**: impregnated activated carbon, KMnO₄-treated alumina, blended beds; stages can be placed in series or layered
►**Particulate filters**: pre-filter G4/MERV 6, after-filter F8/MERV 14 (upgradable to HEPA H13/H14)
►**Servicing**: side-access door changeout, no ductwork removal; ΔP gauge across the chemical stage as standard
►**Power**: 380/460V three phase (BS-DS is 380V/3Ø/50Hz)
Six Families at a Glance
| Family | Name | Airflow arrangement | Airflow range CMH |
|---|---|---|---|
| BS-APS | Recirculating air purifier | Indoor recirculation | 850 – 6,800 |
| BS-PPS | Positive pressurization unit | Once-through outside air | 850 – 6,860 |
| BS-SAH | Side access housing | In-duct section | 850 – 68,000 |
| BS-DBS | Deep bed scrubber | In-duct or exhaust side | 510 – 18,350 |
| BS-HDBS | High deep bed scrubber | Exhaust side | 476 – 8,840 |
| BS-DS | Drum scrubber | Local point extraction | 170 – 1,700 |
상세 설명
What a Chemical Filter Housing Handles
HEPA and ULPA filters reach 99.97% or better at the most penetrating particle size of 0.1–0.3 μm. Gaseous molecules are another matter entirely: HCl has a kinetic diameter of about 0.3 nm and NH₃ about 0.26 nm, three orders of magnitude below the MPPS. To the filter they effectively do not exist, and they pass straight through. In the semiconductor industry these molecular contaminants are collectively called AMC (Airborne Molecular Contamination). What they cause is not particle defects but photoresist T-topping, metal line corrosion, wafer surface hazing and dopant concentration drift — the class of problem where no particles can be found yet yield falls. The only way to remove molecules is adsorption: the molecule has to stay in the media pore long enough to be fixed by physisorption, chemical reaction or oxidation. A chemical filter housing is that requirement engineered: chemical media, the particulate filters that protect it, and a fan able to overcome all three stages, integrated into an enclosure whose media can be replaced on a schedule.Inside a Chemical Filter Housing: Three Stages
Air passes the pre-filter, then the chemical media, then the after-filter, before the fan pushes it out
The chemical media stage is the only one that trades time for efficiency — particulate filters intercept, chemical media adsorbs, and a molecule has to stay inside the pore long enough to be captured. The parameter to lock down during selection is therefore residence time, not media weight.
Sorting the Six Families
Cut first on the airflow arrangement — where the air comes from and where it goes after treatment. Cut second on airflow. Those two cuts usually leave one or two options.Airflow, Residence Time and Typical Application
Cut first on where the air comes from and where it goes, then on airflow — those two cuts usually leave one or two options
| Model | Airflow arrangement | Airflow range | Media depth / residence time | Clean total ΔP | Typical application |
|---|---|---|---|---|---|
BS-APS Recirculating air purifier | Indoor recirculation | 850–6,800 CMH (500–4,000 CFM) | 2 passes in series / 0.24 s | approx. 1,120 Pa | Lower AMC inside the cleanroom; retrofit into existing plants |
BS-PPS Positive pressurization unit | Once-through outside air | 850–6,860 CMH (500–4,040 CFM) | 2 passes in series / 0.24 s | approx. 1,120 Pa | Hold room positive pressure; scrub outside air before it enters |
BS-SAH Side access housing | In-duct section | 850–68,000 CMH (500–40,000 CFM) | 12″/18″ modules / 0.06–0.19 s | 350–780 Pa | Mounted on MAU/AHU ducting; high airflow, low concentration |
BS-DBS Deep bed scrubber | In-duct or exhaust side | 510–18,350 CMH (300–10,800 CFM) | 12″ deep bed ×1–3 / 0.8–2.4 s | 850–2,025 Pa (1–2 beds) | Process exhaust, high acid/base loading, high removal required |
BS-HDBS High deep bed scrubber | Exhaust side | 476–8,840 CMH (280–5,200 CFM) | Extended bed height / deepest configuration | 2,100–2,500 Pa | Single high-concentration point needing one-pass treatment |
BS-DS Drum scrubber | Local point extraction | 170–1,700 CMH (100–1,000 CFM) | 0.14–1.10 m³ media drum | Depends on media | Chemical baths, local exhaust points, temporary treatment |
Residence time is the column most often skipped and the one that most decides removal efficiency. At the same 3,400 CMH, a side-access panel module gives only 0.06 s while a single-bed deep bed scrubber gives 0.8 s — more than tenfold apart, covering completely different concentration ranges. Low concentration with high airflow goes to modules; high concentration with low airflow goes to deep beds.
How to Select
Four Selection Steps — In This Order
Arrangement → airflow → media and residence time → pressure drop and fan; each step feeds the next
The usual derailment is jumping from step 2 to step 4: the model gets picked to suit existing ducting, and only then does it turn out residence time is short. Deepening the media is the only fix, pressure drop climbs, and now the fan has to be reselected and the power feed re-run. Get the residence time in step 3 right and the fan in step 4 is chosen correctly the first time.
Step 1: Fix the airflow arrangement
- **Indoor recirculation (BS-APS)** — the unit sits inside the cleanroom or process area, drawing room air and returning it treated to the same space. It leaves outside air and the room pressure balance untouched, making it the fastest remedy when an existing plant finds AMC out of specification. The limit is that it dilutes rather than blocks: with a continuous indoor source, concentration settles at an equilibrium. - **Once-through positive pressurization (BS-PPS)** — treats outside air and supplies it one way into the room while holding positive pressure. Suited to sites where the outside air itself carries acids or bases (near chemical plants, coastal, urban), keeping contamination outside the door. This is the only arrangement that genuinely lowers the concentration entering the room. - **In-duct section (BS-SAH)** — a housing plus fan, in series on the MAU/AHU supply header. One unit covers the whole plant at the lowest cost per unit airflow; the trade-offs are the duct space required and a single shared media set for the whole plant, so locally high-concentration areas still need separate treatment. - **Exhaust-side scrubbing (BS-DBS / BS-HDBS / BS-DS)** — installed on the process exhaust side, handling gas orders of magnitude more concentrated than room air. Here the goal is not indoor air quality but emission compliance and equipment corrosion protection.Step 2: Fix the airflow
Three methods for three purposes; using the wrong one is off by several times: - **Air changes method** (recirculation): airflow = room volume × air changes per hour. AMC control commonly takes 4–10 ACH; strict litho areas can exceed 15 ACH. - **Dilution method** (known source): airflow = emission rate ÷ (target concentration − inlet concentration). This is the only method that answers how far concentration will actually fall for a given airflow, provided the emission rate can be measured. - **Makeup volume method** (positive pressurization): airflow = room leakage + process exhaust + positive-pressure margin. In practice the margin is commonly 10–15% of the total. Once calculated, check the airflow back against the model's design face velocity range — forcing a large airflow into a small housing leaves residence time short.Step 3: Fix media and residence time
First identify which class of molecule has to go. Acids and bases rely on chemisorption, VOCs and condensables on physisorption, dopants on oxidation; the three mechanisms are not interchangeable.Contaminant Class → Media Configuration → Suggested Model
Split by the four SEMI F21 classes; each adsorbs by a different mechanism, so the media are not interchangeable
| Class | Common species | Media configuration | Adsorption mechanism | Suggested model |
|---|---|---|---|---|
| Acids MA | HCl, HF, H₂SO₄, NOx, SOx | Alkali-impregnated carbon (KOH / K₂CO₃) | Chemisorption: neutralised, then fixed on the carbon surface | BS-APS / BS-PPS / BS-SAH |
| Bases MB | NH₃, amines, NMP | Acid-impregnated carbon (H₃PO₄ / citric acid) | Chemisorption: forms a salt with the acidic functional group | BS-APS / BS-PPS / BS-SAH |
| Condensables MC | BHT, NMP, DOP (boiling point >150°C) | High surface area coconut shell carbon | Physisorption: pore structure and van der Waals forces | BS-SAH / BS-DBS |
| Dopants MD | AsH₃, B₂H₆, BF₃, TEP | KMnO₄-treated alumina + blended bed | Oxidation: oxidised first, then fixed — irreversible | BS-DBS / BS-HDBS |
| General VOC | Toluene, acetone, IPA, ethyl acetate | Non-impregnated carbon (granular or honeycomb) | Physisorption: recovery worth considering at high concentration | BS-SAH / BS-DBS / BS-DS |
Real plants almost never have just one class of contaminant, so the chemical stage is usually built as a blended bed (different media layered) or several stages in series. Watch out for one constraint: acidic and alkaline media placed in the same layer neutralise each other and both go dead, so they must be separated into different layers or stages — the limitation most often overlooked when configuring.
Face Velocity, Residence Time and ΔP: Change One and All Three Move
At the same airflow, raising face velocity shrinks the housing — at the cost of shorter residence time and lower removal
| Configuration | Media depth | Face velocity | Residence time | Clean ΔP | Suited concentration | Relative residence time |
|---|---|---|---|---|---|---|
| BS-SAH PM-18 | 18″ (457 mm) | 2.50 m/s (500 FPM) | 0.06 s | 450 Pa | Low concentration, high airflow | |
| BS-SAH PM-12 | 12″ (305 mm) | 1.25 m/s (250 FPM) | 0.12 s | 777 Pa | Low concentration | |
| BS-SAH CCF-18/24 | 18″/24″ canister | 2.50 m/s (500 FPM) | 0.192 s | 350–400 Pa | Low to medium concentration | |
| BS-APS / BS-PPS | 2 passes in series | 1.27 m/s (250 FPM) | 0.24 s | approx. 1,120 Pa | Medium concentration, indoor recirculation | |
| BS-DBS single bed | 12″ deep bed ×1 | 0.38 m/s (75 FPM) | 0.8 s | 850–1,275 Pa | High concentration | |
| BS-DBS triple bed | 12″ deep bed ×3 | 0.38 m/s (75 FPM) | 2.4 s | over 2,025 Pa | Very high concentration, process exhaust |
For deep beds, residence time = bed depth ÷ face velocity (a 12″ bed at 0.381 m/s gives 0.8 s). For panel and canister modules, what counts is the actual media thickness rather than module depth, so a 12″ module has far less residence time than a 12″ deep bed. There are only two ways to lengthen residence time: deepen the bed (bigger housing, higher ΔP) or lower the face velocity (more face area at the same airflow, so again a bigger housing). No chemical filter housing is simultaneously small, deep and low-ΔP — selection is picking an acceptable trade among the three.
Step 4: Fix ΔP and the fan
Total pressure drop is the sum of three stages, and it climbs steadily as the media loads. Select the fan against the final pressure drop rather than the clean value, or airflow will fall below design partway through the filter's life. The changeout ΔP is generally set at 1.5–2 times the clean value, and the fan static pressure must still deliver design airflow at that point. If this step does not clear, go back to step 3 and change bed depth or model — do not simply fit a larger motor, which only raises power consumption and noise together.Specifications
BS-APS Recirculating Air Purifier
| Model | Airflow CMH | Airflow CFM | Motor kW (HP) | Dimensions H×W×D mm | Net weight kg |
|---|---|---|---|---|---|
| BS-APS-500H | 850 | 500 | 0.75 (1.0) | 719 × 602 × 2,438 | 272 |
| BS-APS-1000H | 1,699 | 1,000 | 0.75 (1.0) | 719 × 602 × 2,438 | 295 |
| BS-APS-2000H | 3,398 | 2,000 | 1.5 (2.0) | 719 × 1,204 × 2,438 | 544 |
| BS-APS-4000H | 6,796 | 4,000 | 3.7 (5.0) | 1,321 × 1,204 × 2,794 | 1,043 |
| BS-APS-500V | 850 | 500 | 0.75 (1.0) | 2,159 × 686 × 686 | 272 |
| BS-APS-1000V | 1,699 | 1,000 | 0.75 (1.0) | 2,159 × 686 × 686 | 363 |
| BS-APS-2000V | 3,398 | 2,000 | 1.5 (2.0) | 2,159 × 1,397 × 686 | 590 |
| BS-APS-4000V | 6,796 | 4,000 | 3.7 (5.0) | 2,667 × 1,397 × 1,206 | 782 |
H = horizontal, V = vertical. Net weight excludes media. Design face velocity 1.27 m/s (250 FPM), two passes in series, residence time 0.24 s, clean total ΔP approx. 1,120 Pa.
BS-PPS Positive Pressurization Unit
| Model | Airflow CMH | Airflow CFM | Motor kW (HP) | Dimensions H×W×D mm | Net weight kg |
|---|---|---|---|---|---|
| BS-PPS-250H | 850 | 500 | 0.75 (1.0) | 719 × 602 × 2,616 | 227 |
| BS-PPS-500H | 1,741 | 1,025 | 0.75 (1.0) | 719 × 602 × 2,616 | 238 |
| BS-PPS-1000H | 3,500 | 2,060 | 1.5 (2.0) | 719 × 1,203 × 2,616 | 365 |
| BS-PPS-2000H | 6,864 | 4,040 | 3.7 (5.0) | 1,321 × 1,203 × 3,048 | 500 |
| BS-PPS-250V | 850 | 500 | 0.75 (1.0) | 2,159 × 686 × 686 | 227 |
| BS-PPS-500V | 1,741 | 1,025 | 0.75 (1.0) | 2,159 × 686 × 686 | 238 |
| BS-PPS-1000V | 3,500 | 2,060 | 1.5 (2.0) | 2,159 × 1,397 × 686 | 365 |
| BS-PPS-2000V | 6,864 | 4,040 | 3.7 (5.0) | 2,667 × 1,397 × 1,206 | 455 |
Model numbers are module reference values; actual airflow is per this table. Clean total ΔP approx. 1,120 Pa.
BS-SAH Side Access Housing (by module configuration)
| Module configuration | Airflow range CMH | Face velocity | Residence time | Clean total ΔP | Motor range kW |
|---|---|---|---|---|---|
| PM-12 (12″ panel) | 850 – 34,000 | 1.25 m/s | 0.12 s | 777 Pa | 0.75 – 22 |
| PM-18 (18″ panel) | 1,700 – 68,000 | 2.50 m/s | 0.06 s | 450 Pa | 0.75 – 37 |
| CCF-18 (18″ canister) | 1,700 – 68,000 | 2.50 m/s | 0.192 s | 400 Pa | 0.75 – 37 |
| CCF-24 (24″ canister) | 1,700 – 68,000 | 2.50 m/s | 0.192 s | 350 Pa | 0.75 – 37 |
Power 380/460V three phase, two-stage module configuration. Overall dimensions depend on module count and airflow; a dimensional drawing is supplied with the quotation.
BS-DBS Deep Bed Scrubber
| Item | Specification |
|---|---|
| Model range | BS-DBS-202 to BS-DBS-1212 |
| Airflow range | 510 – 18,351 CMH (300 – 10,800 CFM) |
| Media volume | 142 – 4,248 L (single 12″ deep bed) |
| Face velocity | 0.381 m/s (75 FPM) |
| Residence time | 0.8 s per 12″ deep bed, stackable 1 – 3 beds |
| Clean total ΔP | single bed 850 – 1,275 Pa; two beds 1,175 – 2,025 Pa |
| Particulate filters | pre-filter MERV 6/G4, interstage MERV 6/G4, final MERV 14/F8 |
| Motor range | 0.75 – 15 kW (1.0 – 20.0 HP) |
| Dimensional range | height 864 – 4,013, width 660 – 3,708, length 2,642 – 3,785 mm |
| Weight range | 795 – 3,791 kg |
BS-HDBS High Deep Bed Scrubber
| Item | Specification |
|---|---|
| Size codes | 26 / 33 / 39 / 44 / 54 / 62 / 73 / 82 / 90 / 100 |
| Airflow range | 476 – 8,840 CMH (280 – 5,200 CFM) |
| Media volume | 0.39 – 5.88 ft³ (by enclosure size) |
| Unit pressure drop | approx. 2,100 – 2,500 Pa (8.5″ – 10.0″ WC) |
| Motor range | 1.5 – 11 kW (2.0 – 15.0 HP) |
| Dimensional range | width 660 – 2,083, length 1,422 – 4,829, height 1,778 – 2,540 mm |
| Weight range | 490 – 2,258 kg |
| Discharge type | horizontal discharge / vertical discharge |
BS-DS Drum Scrubber
| Model | Airflow CMH | Vessel dia. mm | Vessel height mm | Inlet | Media volume m³ | Motor kW |
|---|---|---|---|---|---|---|
| BS-DS-100 | 170 | 600 | 1,220 | DN140 | 0.14 | 0.37 |
| BS-DS-300 | 510 | 760 | 1,525 | DN160 | 0.28 | 1.50 |
| BS-DS-500 | 850 | 915 | 1,525 | DN200 | 0.48 | 1.50 |
| BS-DS-750 | 1,275 | 1,150 | 1,220 | DN200 | 0.76 | 1.50 |
| BS-DS-1000 | 1,700 | 1,320 | 1,525 | DN200 | 1.10 | 2.24 |
Power 380V/3Ø/50Hz.
The door panel carries the ΔP gauge spanning the chemical media stage and an airflow direction marker:
Vertical models have a small footprint, suited to placement beside a tool or against a wall. Left is the standard pushbutton panel, right the touchscreen panel with ΔP display:
A vertical model installed on site, with castors on the base for repositioning:
Enclosure and Appearance
The horizontal model's side-access doors let the media be drawn out as a whole section without dismantling ducting:
The door panel carries the ΔP gauge spanning the chemical media stage and an airflow direction marker:
Vertical models have a small footprint, suited to placement beside a tool or against a wall. Left is the standard pushbutton panel, right the touchscreen panel with ΔP display:
A vertical model installed on site, with castors on the base for repositioning:
