Bộ lọc hóa học than hoạt tính
Chemical Filter for Nikon Exposure Machines / PCDA Chemical Filter
Tổng quan sản phẩm
Chemical filters are mainly used to filter alkaline substances (ammonia, amines, etc.), acidic substances (hydrogen chloride, hydrogen sulfide, sulfur dioxide, etc.), and organic substances (high-boiling organics, siloxanes, etc.).
Tính năng & Thông số kỹ thuật
Provides clean-air purification inside manufacturing equipment and equipment piping, removes trace gases in compressed air used for supply/exhaust systems, removes dust during product packaging, and serves as an alternative to N2 Pure-type gases.
Mô tả chi tiết
PCDA chemical filters are commonly applied to:
Semiconductors, LCD exposure equipment, measurement instrument peripherals, inspection processes.
Bonding machines, laser processing machines, etc.
Solar-cell glass substrate processing, food processing, regenerative medicine, analytical instruments.
Features the following advantages:
Simple installation — can be connected directly in-line with compressed air piping.
Can remove acidic gases, alkaline gases, and organic gases.
Flow rate and target gases can be freely designed.
Product specifications:
| Airflow | Model | Dimensions | Connection | Body | Weight |
|---|---|---|---|---|---|
| 30^/mim | PG-F32A38S158TS | 080x158mm | Rc 3/8in | SUS304 | Approx. 2kg |
| 50^/mim | PG-F50A38S258TS | 0100x258mm | Rc 3/8in | SUS304 | Approx. 4kg |
| 100^/mim | PG-F100A12S258TS | 0170x258mm | Rc 1/2in | SUS304 | Approx. 10kg |