활성탄 케미컬 필터
nikon 노광기용 필터 / PCDA 케미컬 필터
제품 개요
케미컬 필터는 주로 염기성 물질(암모니아, 아민류 등), 산성 물질(염화수소, 황화수소, 이산화황 등), 유기 물질(고비점 물질, 실록산 등)의 여과에 사용합니다.
제품 특성
Provides clean-air purification inside manufacturing equipment and equipment piping, removes trace gases in compressed air used for supply/exhaust systems, removes dust during product packaging, and serves as an alternative to N2 Pure-type gases.
상세 설명
PCDA chemical filters are commonly applied to:
Semiconductors, LCD exposure equipment, measurement instrument peripherals, inspection processes.
Bonding machines, laser processing machines, etc.
Solar-cell glass substrate processing, food processing, regenerative medicine, analytical instruments.
Features the following advantages:
Simple installation — can be connected directly in-line with compressed air piping.
Can remove acidic gases, alkaline gases, and organic gases.
Flow rate and target gases can be freely designed.
Product specifications:
| Airflow | Model | Dimensions | Connection | Body | Weight |
|---|---|---|---|---|---|
| 30^/mim | PG-F32A38S158TS | 080x158mm | Rc 3/8in | SUS304 | Approx. 2kg |
| 50^/mim | PG-F50A38S258TS | 0100x258mm | Rc 3/8in | SUS304 | Approx. 4kg |
| 100^/mim | PG-F100A12S258TS | 0170x258mm | Rc 1/2in | SUS304 | Approx. 10kg |
