내열 필터
NIPPON MUKI 니폰무키 ULPA/HEPA 저발진 내열 필터(350℃)
제품 개요
당사는 일본 NIPPON MUKI(니폰무키)의 내열 HEPA 필터를 대리 판매하며, 대만에서 자체 제작한 저발진 내열 필터도 함께 취급합니다. 대만산 일반 내열 필터는 오븐 온도가 300도를 넘어가면 자체 발진(필터의 유리섬유가 떨어져 나오는 현상)이 생겨 공정 전체를 오염시키는데, 요구 조건이 까다로운 반도체 공정에서는 이 때문에 웨이퍼 수율이 지나치게 낮아지는 일이 흔합니다.
제품 특성
Nippon Muki has developed a new generation of low-outgassing high-temperature filters. Even at high temperatures the outgassing can be reduced to single-digit levels or even lower, allowing HEPA-grade filtration efficiency to be maintained for extended periods at 350°C, and low outgassing for roughly two hours even at 400°C.
상세 설명
High-Efficiency 350°C High-Temperature Filter
HEPA 99.97%:
The HEPA 99.97% high-efficiency filter captures 0.3-micron dust particles at up to 99.97% efficiency, and maintains 0.3um 99.97% efficiency even under high-temperature baking. Its filtration efficiency is higher than HEPA 95%, significantly improving oven cleanliness.
HEPA 95%:
Its efficiency falls between HEPA 99.97% and medium-efficiency 95%. Although the efficiency class is slightly lower than HEPA 99.97%, its pressure drop is much lower, resulting in longer service life. Lower pressure drop increases airflow and reduces equipment load, saving energy.
Main distributed models: GCW, GCV, ATMV, ATMVC, ATMCU, GCV, ATMH, ATMCH, etc.
Special low-outgassing design.
No sealant used—special sealing method prevents sealant material from fracturing.
Special high-temperature gaskets that do not adhere to the housing at high temperatures, suitable for long-term use.
All sizes can be custom-manufactured.
Dedicated filters for cleanroom ovens in LCD, packaging/testing and semiconductor plants.
