NIPPON MUKI
BGMML Low-Boron ULPA Filter
Product Overview
NIPPON MUKI low-boron ULPA filter significantly reduces the boron content of the filter media, preventing boron contamination from affecting semiconductor processes. Particularly suitable for advanced wafer fabrication environments that are sensitive to boron.
Features & Specifications
Model: BGMML
Efficiency: ULPA grade (≥99.9995% @MPPS)
Feature: Low Boron design
Media: Low-boron ultra-fine glass fiber
Manufacturer: NIPPON MUKI Co., Ltd.
Detailed Description
The BGMML low-boron ULPA filter uses a specialized low-boron glass fiber formulation to keep boron emissions from the media at extremely low levels.
Designed for semiconductor diffusion, ion implantation, and other process areas that are highly sensitive to boron contamination.
