NIPPON MUKI
ATMCH-SL 250°C Silicone-Free High-Temperature High-Airflow HEPA Filter
Product Overview
NIPPON MUKI 250°C high-temperature high-airflow HEPA filter (silicone-free type). Contains absolutely no silicone components, avoiding siloxane volatilization and resulting process contamination at high temperatures. Particularly suitable for semiconductor and optical processes sensitive to silicone contamination.
Features & Specifications
Model: ATMCH-SL
Temperature rating: 250°C (continuous use)
Efficiency: HEPA grade (≥99.97% @0.3μm)
Features: Silicone-free, high-airflow
Filter media: High-temperature glass fiber
Sealing: Non-silicone sealing material
Frame: Stainless steel
Manufacturer: NIPPON MUKI Co., Ltd.
Detailed Description
ATMCH-SL is the silicone-free version of ATMCH, completely excluding silicone components.
In high-temperature environments it does not release siloxanes or other volatile silicone compounds, making it the ideal choice for advanced semiconductor processes and optical coating equipment with zero tolerance for silicone contamination.





