NIPPON MUKI
ATMCU 350°C High-Temperature HEPA Filter
Product Overview
NIPPON MUKI 350°C high-temperature HEPA filter adopting low-dust-generation design. Maintains HEPA efficiency even in 350°C environments while minimizing self-generated dust. Widely used in semiconductor diffusion furnaces, ovens, and CVD processes.
Features & Specifications
Model: ATMCU
Temperature rating: 350°C (continuous use)
Efficiency: HEPA grade (≥99.97% @0.3μm)
Filter media: Low-dust-generation high-temperature glass fiber
Frame: Stainless steel
Manufacturer: NIPPON MUKI Co., Ltd.
Detailed Description
ATMCU series is NIPPON MUKI's classic 350°C high-temperature HEPA filter.
New-generation low-dust-generation technology enables dust generation to be reduced to single digits or lower even under high-temperature conditions, maintaining HEPA-grade filtration efficiency over extended periods.





