Activated Carbon Chemical Filters
Chemical Filter for Nikon Exposure Machines / PCDA Chemical Filter
Product Overview
Chemical filters are mainly used to filter alkaline substances (ammonia, amines, etc.), acidic substances (hydrogen chloride, hydrogen sulfide, sulfur dioxide, etc.), and organic substances (high-boiling organics, siloxanes, etc.).
Features & Specifications
Provides clean-air purification inside manufacturing equipment and equipment piping, removes trace gases in compressed air used for supply/exhaust systems, removes dust during product packaging, and serves as an alternative to N2 Pure-type gases.
Detailed Description
PCDA chemical filters are commonly applied to:
Semiconductors, LCD exposure equipment, measurement instrument peripherals, inspection processes.
Bonding machines, laser processing machines, etc.
Solar-cell glass substrate processing, food processing, regenerative medicine, analytical instruments.
Features the following advantages:
Simple installation — can be connected directly in-line with compressed air piping.
Can remove acidic gases, alkaline gases, and organic gases.
Flow rate and target gases can be freely designed.
Product specifications:
| Airflow | Model | Dimensions | Connection | Body | Weight |
|---|---|---|---|---|---|
| 30^/mim | PG-F32A38S158TS | 080x158mm | Rc 3/8in | SUS304 | Approx. 2kg |
| 50^/mim | PG-F50A38S258TS | 0100x258mm | Rc 3/8in | SUS304 | Approx. 4kg |
| 100^/mim | PG-F100A12S258TS | 0170x258mm | Rc 1/2in | SUS304 | Approx. 10kg |
