Heat-Resistant Filters
NIPPON MUKI ULPA/HEPA Low-Outgassing High-Temperature Filter (350°C)
Product Overview
Our company is the authorized distributor for Nippon MUKI (Japan) high-temperature HEPA filters. We also offer Taiwan-made low-outgassing high-temperature filters. Compared with typical Taiwan-made high-temperature filters, when the oven ramps above 300°C self-outgassing occurs (release of fibers from the filter's own glass fiber media), contaminating the entire process. In demanding semiconductor processes this can cause low wafer yields.
Features & Specifications
Nippon Muki has developed a new generation of low-outgassing high-temperature filters. Even at high temperatures the outgassing can be reduced to single-digit levels or even lower, allowing HEPA-grade filtration efficiency to be maintained for extended periods at 350°C, and low outgassing for roughly two hours even at 400°C.
Detailed Description
High-Efficiency 350°C High-Temperature Filter
HEPA 99.97%:
The HEPA 99.97% high-efficiency filter captures 0.3-micron dust particles at up to 99.97% efficiency, and maintains 0.3um 99.97% efficiency even under high-temperature baking. Its filtration efficiency is higher than HEPA 95%, significantly improving oven cleanliness.
HEPA 95%:
Its efficiency falls between HEPA 99.97% and medium-efficiency 95%. Although the efficiency class is slightly lower than HEPA 99.97%, its pressure drop is much lower, resulting in longer service life. Lower pressure drop increases airflow and reduces equipment load, saving energy.
Main distributed models: GCW, GCV, ATMV, ATMVC, ATMCU, GCV, ATMH, ATMCH, etc.
Special low-outgassing design.
No sealant used—special sealing method prevents sealant material from fracturing.
Special high-temperature gaskets that do not adhere to the housing at high temperatures, suitable for long-term use.
All sizes can be custom-manufactured.
Dedicated filters for cleanroom ovens in LCD, packaging/testing and semiconductor plants.
